Diode Circuit-based Glass Plasma-Chemical Etching Capabilities
نویسندگان
چکیده
منابع مشابه
InP-based Waveguides: comparison of ECR Plasma Etching and Wet-chemical Etching
1 COBRA Inter-University Research Institute on Communication Technology Eindhoven University of Technology –Faculty of Electrical Engineering Telecommunications Technology and Electromagnetics – Opto-Electronic Devices Group P.O.Box 513, 5600 MB Eindhoven, The Netherlands E-mail: [email protected] 2 Department of Electronic Materials Engineering, Research School of Physical Sciences and En...
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ژورنال
عنوان ژورنال: Mechanical Engineering and Computer Science
سال: 2017
ISSN: 2587-9278
DOI: 10.24108/1117.0001324